JPH028131U - - Google Patents
Info
- Publication number
- JPH028131U JPH028131U JP8563488U JP8563488U JPH028131U JP H028131 U JPH028131 U JP H028131U JP 8563488 U JP8563488 U JP 8563488U JP 8563488 U JP8563488 U JP 8563488U JP H028131 U JPH028131 U JP H028131U
- Authority
- JP
- Japan
- Prior art keywords
- chemical solution
- tank
- filter
- discharge port
- heat exchanger
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8563488U JPH028131U (en]) | 1988-06-27 | 1988-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8563488U JPH028131U (en]) | 1988-06-27 | 1988-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH028131U true JPH028131U (en]) | 1990-01-19 |
Family
ID=31310287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8563488U Pending JPH028131U (en]) | 1988-06-27 | 1988-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH028131U (en]) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61125017A (ja) * | 1984-11-22 | 1986-06-12 | Hitachi Tokyo Electronics Co Ltd | 塗布装置 |
| JPS61214520A (ja) * | 1985-03-20 | 1986-09-24 | Hitachi Ltd | 塗布装置 |
| JPS62279632A (ja) * | 1986-05-28 | 1987-12-04 | Nec Corp | 半導体製造装置 |
-
1988
- 1988-06-27 JP JP8563488U patent/JPH028131U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61125017A (ja) * | 1984-11-22 | 1986-06-12 | Hitachi Tokyo Electronics Co Ltd | 塗布装置 |
| JPS61214520A (ja) * | 1985-03-20 | 1986-09-24 | Hitachi Ltd | 塗布装置 |
| JPS62279632A (ja) * | 1986-05-28 | 1987-12-04 | Nec Corp | 半導体製造装置 |